PhotonIcs and Electromagnetics Research Symposium,
also known as Progress In Electromagnetics Research Symposium
PIERS Proceedings
PIER Journals
Published by The Electromagnetics Academy
Published: 2015-07-09
Studies of the RF Energy Delivery Mechanism and Its Reformation in the Low Pressure ICP Discharge
By
Artur F. Piskunkov,
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    Artur F. Piskunkov

    Research Institute of Applied Mechanics and Electrodynamics of the Moscow Aviation Institute (National Research University), Russia

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Valentin A. Riaby
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    Valentin A. Riaby

    Research Institute of Applied Mechanics and Electrodynamics of the Moscow Aviation Institute (National Research University), Russia

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Proceedings of 2015 Photonics & Electromagnetics Research Symposium, Prague, July 6 - 9，Page(s)609-614
Abstract
Citation
Artur F. Piskunkov, and Valentin A. Riaby, "Studies of the RF Energy Delivery Mechanism and Its Reformation in the Low Pressure ICP Discharge," Proceedings of 2015 Photonics & Electromagnetics Research Symposium, Prague, July 6 - 9，Page(s)609-614
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