Sang-Hyun Oh,
Xiaoshu Chen,
Hyeong-Ryeol Park,
and
Daehan Yoo,
"Atomic Layer Lithography for High-throughput Fabrication of Sub-10-nm Plasmonic Gap Arrays,"
Proceedings of 2026 Photonics & Electromagnetics Research Symposium, Suzhou, China, 27 - 31 July
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